Alicat MC Series Mass Flow Controller Bedienungsanleitung

Precision Gas Mass Flow ControllersThe Fastest Flow Controller Company in the World!Operating ManualMC-SeriesMCS-SeriesMCR-SeriesWHISPERMCV-Series



OUTPUT SIGNALS

CAUTION

 

#C+21.50 +0.00 CCM MENUSETPT0.000 SCCMAirPSIA+13.60 +0.00 SCCMMain+0.00SETPT0123.4MENUSLPM+123.4TOTAL/ TIMERBATCH RESET0000:09:59 SCC00

MAIN  



SELECT MENU

CONTROL SETUP Control Setup

CAUTION! 

06/04/2014 Rev.34 DOC-ALIMAN16CRECALIBRATIONYour Alicat instrument is a precision device and Alicat strongly recommends that you send

PID TUNING

PD 

GAS SELECTGas SelectGAS SELECT

COMMUNICATION SELECT RS232 COMM COMM Select MenuUnit ID

MISCELLANEOUS MiscellaneousMISCMISC1MISC2. MISC1

MISC2STP

BACK MAINSCROLLR8: AP Sig 7871R9: Temp Sig 39071R10: DP Side 9986R11: DP Brdg 36673R13: AP Brdg 36673R16: Meter Fun 199R1



MCD 

FLOWBack

3Thank you for purchasing an Alicat Gas Flow Controller. 

 





33Gas Select              

34                  



  

       

GasNumberShort FormLong FormViscosity*25 deg C 14.696 psiaDensity**25 deg C 14.696 psiaCompressibility 25 deg C 14.696 psia0 Air Air 184.918 1.1840

GasNumberShort FormLong FormViscosity*0 deg C 14.696 psiaDensity**0 deg C 14.696 psiaCompressibility 0 deg C 14.696 psia0 Air Air 172.588 1.2927 0.9

4TABLE OF CONTENTS Page     

TROUBLESHOOTING





43

44BATCH PROCESSING MODE – CONTROLLERS ONLY           





 

Accessories   

     

TABLE OF CONTENTS Page   

Technical Data for Alicat MC and MCR Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full ScaleStandard Operating Specications

  MC-Series:0 - 100 sccm0 - 200 sccm0 - 500 sccm0

  

   

      

Technical Data for Whisper Low Pressure Drop Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 500 slpm Full ScalePerformance Whisper MCW &

WHISPER MCW:0 - 0.5 sccm0 - 1 sccm0 - 2 sccm0 - 5 sccm0 - 10 sccm0 - 20 sccmMCW 0.5 sccm to 20 sccm approximate shipping weight: 1.1 lb.WHISPER MCW:

   

    

Technical Data for MCV & MCVS Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 20 slpm Full ScaleMCV

GETTING STARTED

 MCV-SeriesAll rangesMCV approximate weight: 3.0 lb.

Technical Data for MCP Moderate Flow Mass Flow Controllers0 to 50 slpm Full Scale through 0 to 250 slpm Full ScaleAlicat MCP mass ow controllers ar

   

Technical Data for Alicat MCD and MCRD Dual Valve Mass Flow Controllers0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full ScaleStandard Operating

MCD-Series0 - 20 slpm shown    

Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers

MCS-Series:0 – 0.5 sccm0 – 1 sccm0 – 2 sccm0 – 5 sccm0 – 10 sccm0 – 20 sccm0 – 50 sccmMCS-Series:0 – 100 sccm0 – 200 sccm0 – 500 sccm0 – 1 slpm0 – 2

  

MCRS-Series:0 – 500 slpm0 – 1000 slpm0 – 1500 slpmMCRS-Series:0 – 2000 slpmMCRS 500 slpm to 1500 slpm approximate weight: 9.0 lb. MCRS 2000 slpm app

   

PLUMBING

SpecicationMeter or GaugeSmall ValveControllerLarge ValveControllerDescriptionInput /Output Signal Digital PROFIBUS DPElectrical Connections DB9Su

Eight Pin Mini-DIN Connector Pin-OutsIf your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN connection, please be sure to refere

   520-290-6060 Ph. 520-290-0109 Fax

Pin  3 











DB15 – Pin-Out Alicat StylePin Number Function1 Ground2 Primary Analog Signal Output3 Ground4 N/C5 Power Supply (+Vdc)6 N/C7 N/C8 Analog Tare (meter

POWER AND SIGNAL CONNECTIONS

Pin Number Function1 Ground2 Primary Analog Signal Output3Analog Tare (meters — when grounded)*Analog Set-Point Input (controllers)*4 Ground5 Power

DB15B – Pin-Out “Brooks” StylePin Number Function1 Ground2 Primary Analog Signal Output3 N/C4 N/C5 Power Supply (+Vdc)6 N/C7 N/C8Analog Tare (meters

DB15K – Pin-Out “MKS” StyleThe following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 w

DB15H – Pin-Out “Hastings H” StylePin Number Function1 N/C2 RS-232 RX (receive) or RS-485 – *3 N/C4 N/C5 Ground6 Primary Analog Signal Output7 Power

DB15S – Pin-Out “Sierra” StylePin Number Function1 Ground2 Primary Analog Signal Output 3 N/C4 N/C5 Ground6 N/C7 N/C8Analog Tare (meters — when grou

Additional Information for Alicat CSA and ATEX Approved DevicesSee the following page for Special Conditions regarding the use of these units!EEx nA

USE of Alicat instruments (M, MW, MS, MC, MCW, MCS, MCR, MCRW, MCRS, P, PS, PC, PCS, PCR and PCRS product families only) in Class 1 Division 2 appl

Serial Number: ______________________Model Number: _________________________Notice: Alicat Scientic, Inc. reserves the right to make any changes and

alicat.com The Fastest Flow Controller Company in the World!#GasAbsoluteViscosity*25°C Density **25°C14.696 psiaCompressibility 25°C14.696 psia0 Ai

INPUT SIGNALSAnalog Input Signal